H2O for Smaller Chips

by Rafael Hernandez on April 5, 2004 · 0 comments

The Rochester Democrat & Chronicle has the story of work by researchers at the Rochester Institute of Technology which could lead to smaller and faster chips. The article is a bit lite on details but it sounds a lot like immersion lithography which would alow chip makers to reuse their current equipment to make the smaller chips, hopefully bringing down prices for everyone.